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Feedthroughs

UHV HotWall

Magnetic fluid (ferrofluid) fills a small annular gap between a rotating shaft and a stationary magnetic pole piece. The gap is part of a high-energy magnetic circuit which includes the shaft and pole piece. The very large magnetic flux in the gap exerts a force on the fluid, holding it in place against pressure difference from atmosphere to vacuum, yielding a dynamic rotary seal in which there is no solid friction. Therefore, very long operating lifetimes are achieved.

Because the magnetic fluid has very low vapor pressure, it remains permanently in place for the entire lifetime of the seal, and does not contaminate the system. Some applications have special requirements (high temperature, highly reactive gases) which can be satisfied by selection of the optimum fluid from our family of fluid materials.

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UHV HotWall™; UHV-compatible rotary feedthrough for high-temperature chambers

Rigaku's HotWall represents a breakthrough in rotary feedthrough technology. Advanced magnetic fluid sealing and thermal design principles are combined into a unique rotary feedthrough ideally suited for high temperature chambers, without the need for water cooling. This patent-pending design utilizes UHV-compatible materials in an all-welded vacuum construction for unmatched performance in previously unattainable thermal and vacuum regimes. Applications include semiconductor processing systems, surface science systems, and process requiring rotary motion through a heated chamber wall operating in the UHV vacuum region.

Features

Unique thermal design
No water cooling
No elastomers
All-welded vacuum construction
Magnets isolated from vacuum
Crossed-roller bearing support system
High pressure capacity: 2.5 atmospheres minimum
Magnaseal^® balanced-magnet circuit
Seal stages outside
Premium high-energy permanent magnets

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