WDA-3640 mapping XRF metrology tool
The Rigaku wafer/disk analyzer (WDA) was first developed in 1977. Today
more than 350 systems have been installed around the world. The history of
this analyzer directly reflects that of thin film device development in the
semiconductor industry.
Our workhorse tool for 200mm (8") and smaller wafers, the WDA-3640
incorporates the our trademark X-Y-θ sample stage
system for superior results on difficult measurements, such as
ferrodielectric films. In addition, an innovative new X-ray tube design
allows for and almost two-fold increase in sensitivity for boron (B) as
compared to conventional excitation sources. Furthermore, the WDA-3640 is
extremely compact, with the basic unit requiring less than 1 m2 of valuable
cleanroom space. And, there is no need for side maintenance service access.
Applications
- Semiconductor devices
- Insulation films: BPSG, SiO2, Si3N4, etc.
- Electrode films: poly-Si, WSix, etc.
- Ferrodielectric films: PZT, BST, SBT, etc.
- Metallic films: Al-Si-Cu, TiW, TiN, etc.
- Magnetic disks
- Magnetic films: CoCrTa, CoPt, Cr, etc.
- Lubricant films: graphite (DLC), fluorine system polymer, etc.
- Substrate: NiP
- Magnetic heads
- Permalloy (Ni-Fe)
- Sendust (Fe-Al-Si)
- Saw devices
- Electrode films: Al-Si-Cu, Al-Cu, Al-Ti, etc.