Semiconductors
Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Our XRF, XRD and XRR metrology tools measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.
Solutions
- High throughput XRF/XRD/XRR tool for patterned wafers: MFM65
- Wafer contamination tool: TXRF-300, TXRF 3750
- Wafer contamination tool with VPD: TXRF-V300
- In-fab XRF tool: WaferX 300, WDA-3640
- Lab high-resolution XRD instrument: SmartLab®, Ultima IV
- High-power θ/θ goniometer system: TTRAX III
- X-ray absorption spectroscopy: R-XAS